Greyscale Lithography-based Fabrication of Thin Polymeric Cantilevers for MEMS/NEMS Applications

  • Abhiru Kumar Basu Singapore University of Technology and Design, Singapore 487372
  • Adreeja Basu St. John’s University United States New York 11439
Keywords: Greyscale Lithography, Cantilevers, Biochemical sensors, Thickness

Abstract

Highly photosensitive epoxy-based polymer SU8 is becoming extensively used for MicroElectro-Mechanical Systems (MEMS) and microfluidic devices not only as a negative photoresist but also as the basic constitutional material because of the easy fabrication of devices with tailored dimensions from µm to mm sizes. Here, we have shown a one-step process for the fabrication of thin cantilever arrays of thickness upto 1-2 µm using MASKLESS GRAYSCALE LITHOGRAPHY (MGL).

Microfabricated polymeric disposable cantilevers can be utilized for label-free biochemical sensing with desirable advantages such as high sensitivity due to low Young’s modulus, low cost compared to its Silicon counterpart and ease in reproducible fabrication. Microcantilever arrays of different shapes were fabricated reproducibly by optimizing the process parameters. Arrays of suspended cantilevers can be used for the fabrication of chemical/biochemical sensors as SU-8 is highly resistant to chemicals and biocompatible making it a suitable material for such sensors.

References

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[3] Basu, A.K., H. Sarkar, and S. Bhattacharya. 2016. Fabrication and resilience measurement of thin aluminium cantilevers using scanning probe microscopy. In Foundations and Frontiers in Computer, Communication and Electrical Engineering - Proceedings of the 3rd International Conference on Foundations and Frontiers in Computer, Communication and Electrical Engineering, C2E2 - 2016.
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[7] Basu, Aviru Kumar, Pankaj Singh Chauhan, Mohit Awasthi, and Shantanu Bhattacharya. 2019a. α-Fe 2 O 3 loaded rGO nanosheets based fast response/recovery CO gas sensor at room temperature. Applied Surface Science. https://doi.org/10.1016/j.apsusc.2018.09.123.
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[9] Basu, Aviru Kumar, Amar Nath Sah, Mayank Manjul Dubey, Prabhat K. Dwivedi, Asima Pradhan, and Shantanu Bhattacharya. 2019. MWCNT and α-Fe2O3 embedded rGO-nanosheets based hybrid structure for room temperature chloroform detection using fast response/recovery cantilever based sensors. Sensors and Actuators, B: Chemical 305. Elsevier: 127457. https://doi.org/10.1016/j.snb.2019.127457.
[10] Basu, Aviru Kumar, Amar Nath Sah, Asima Pradhan, and Shantanu Bhattacharya. 2019. Poly-L-Lysine functionalised MWCNT-rGO nanosheets based 3-d hybrid structure for femtomolar level cholesterol detection using cantilever based sensing platform. Scientific Reports. https://doi.org/10.1038/s41598-019-40259-5.
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Published
2020-10-01
How to Cite
Basu, A., & Basu, A. (2020). Greyscale Lithography-based Fabrication of Thin Polymeric Cantilevers for MEMS/NEMS Applications. CSVTU International Journal of Biotechnology, Bioinformatics and Biomedical, 5(2), 40-44. Retrieved from http://csvtujournal.in/index.php/ijbbb/article/view/112
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Articles