BASU, A. K.; BASU, A. Greyscale Lithography-based Fabrication of Thin Polymeric Cantilevers for MEMS/NEMS Applications. CSVTU International Journal of Biotechnology, Bioinformatics and Biomedical, [S. l.], v. 5, n. 2, p. 40–44, 2020. Disponível em: https://csvtujournal.in/index.php/ijbbb/article/view/112. Acesso em: 22 oct. 2025.